Plasma Reactor (Barrel Chamber) (PR500)

Designed with large chamber size made of quartz considered almost completely resistant against most plasma processes

RF Power: Max. 500W

Feature

Space-saving design with oscillation section integrated with a portion of the chamber

Feature

Equipped with a large quartz chamber (φ215mm) which can process bigger testing samples

Feature

Outstanding operability and safety by the automatic tuning system equipped as a standard function

Model	PR500
System	DP mode, Barrel type
High Frequency Output	Max. 500W
Oscillation Frequency	13.56MHz
Tuning Method	Automatic tuning
Reaction Chamber	Quartz φ215 × L305 mm x 1 chamber
Reaction Gas System	Dual system (oxygen/CF4)
Control System	Manual
Piping Material	SUS, Teflon
Accessories	Vacuum grease: 1 pc., O-ring for reaction chamber: 1 pc.
Internal dimensions（φ×D mm）	φ215×305mm
External dimensions（W×D×H mm）	438×520×760mm
Remarks(dimensions)	215φ x 305Dmm x 1 chamber
Power Source	AC115V/AC220V Single phase with step-down transformer
Weight	53kg

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