Small and compact, suitable for R&D purposes
Features of Plasma Cleaner (Parallel Electrode, Compact) (PiPi)
Plasma Cleaner (Parallel Electrode, Compact) (PiPi)
Description
Small and compact, suitable for R&D purposes
Compact design, RIE (Reactive Ion Etching) mode
Feature
Economical plasma cleaning machine
Feature
Simple plasma processing operation
Feature
Among the plasmatized gases, in addition to ions and electrons, there are electrically neutral atoms and molecules that electrons have moved to the electrical excitation.
Feature
By sputtering effect by ions, it is possible to remove not only organic matter on the surface of the object but also inorganic matter.
| Model | PiPi |
|---|---|
| Model | PiPi |
| Plasma mode | RIE (reactive ion etching) |
| Electrode structure | Parallel flat panel type |
| Electrode dimensions | W130×D130mm |
| Internal dmensions | W230×D130×H100mm |
| External dimensions | W438×D520×H565mm |
| Power source (50/60Hz) | AC115V/AC220V Single phase with step-down transformer |
| Vacuum meter | Bourdon gauge |
| Controller | Sequencer |
| Operation/display unit | 4.5-inch monochrome STN touch panel |
| High-frequency out-put power | 50-200W |
| Reference oscillator | Quarts oscillator |
| Oscillation frequency | 13.56MHz |
| Output setting | Manual setting knob |
| Matching method | Auto tuning |
| Purge gas | N2 1/4-inch bite type tube fitting |
| Reaction gas | Ar mass flow meter 1/4-inch bite type tube fitting |
| Internal dimensions（W×D×H mm） | 230×130×100mm |
| External dimensions（W×D×H mm） | 438×520×565mm |
| Power Source | 115V /220V Single phase with step-down transformer |
| Weight | 50kg |
